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材料簡(jiǎn)介

Introduction

中間層為 FSTQZ?W 高純白色不透明石英材料，保留了其出色的隔熱性能；兩側(cè)為半導(dǎo)體級(jí)透明石英材料，高溫區(qū)使用規(guī)避了乳白材料顆粒脫落的風(fēng)險(xiǎn)，穩(wěn)定性更高；復(fù)合層熔融結(jié)合，無(wú)空穴，具有出色的冷熱加工性能，作為隔熱和保溫材料應(yīng)用于晶圓制程中。
透明層可根據(jù)客戶需求定制：FLH321、FLH321H、FLH621、FLH621H、F-HUV等。

The middle layer is FSTQZ?W high purity opaque quartz material, which remains its excellent thermal insulation property.Both sides are semiconductor grade transparent quartz material, which can avoid the risk of opaque material particle falling off at high temperature usage and provide higher stability.The composite layers are fused together and void free, with excellent cold and hot processing properties. It is used as thermal insulation material in wafer fabrication process. The transparent layer can be customized according to customer requirements:FLH321, FLH321H, FLH621, FLH621H, F-HUV, etc.

Al

14.2

Ca

0.60

Mg

0.05

Cu

0.01

Fe

0.23

Ni

0.05

Mn

0.05

Li

0.44

K

0.25

Na

0.12

Zr

—

Ti

1.3

B

0.08

Co

—

總和

17.38